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Design of a Monolithic 3DOF MEMS Capacitive Accelerometer: Utilizing Surface Micromachining Technology Using PolyMUMPS Process: Khan, Muhammad Shuja: 9783845409528: Amazon.com: Books
Micro Electro Mechanical System Design (Mechanical Engineering): Allen, James J., Allen, James J.: 9780824758240: Amazon.com: Books
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Mems 2001: The 14th IEEE International Conference on Micro Electro Mechanical Systems : Interlaken, Switzerland January 21-25, 2001: IEEE International Conference on Micro Electro Mechanical Systems (14th : 2001 Interlaken, Switzerland): 9780780359987 ...
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Introducción Histórica Sobre el desarrollo de la tecnología de MEMS: Sistemas-Micro-Electro-Mecánicos (Spanish Edition): Flores Herrera, Luis Armando: 9786202155656: Books: Amazon.com
Slow Rarefied Flows: Theory and Application to Micro-Electro-Mechanical Systems (Progress in Mathematical Physics, 41): Cercignani, Carlo: 9783764375348: Amazon.com: Books
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